Ion energy angular distribution
WebFirst consider the angular distribution. As has already been men- tioned, in the 782-805 eV energy range there are diagram lines cor- responding to the K-vacancy decay. According to the general theory [4 , their angular distribution must be isotropic, which was confir- med by the experiment ~,~ . WebThe flux, energy and angular distribution of ions generated from inductively coupled argon plasma were measured, using a gridded retarding field ion analyzer, to investigate …
Ion energy angular distribution
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Web28 mei 2012 · The results provide the kinetic energy and angular distributions of product ions. The analysis of the results indicates that the dissociation leading to C(2)H(+)+H(+) … WebFigure 4: Typical angular distribution of the ions in sheath (a) and suggested modification of the distribution for simulation tests (b); plot (c) shows curves transition from mono …
Web1 dec. 1994 · Analysis of the experimental data on energy and angular distributions has revealed a large variety of sputtering modes such as elastic and inelastic collisional sputtering, ion-induced thermal evaporation, ejection of excited atoms, sputtering due to exciton decay, formation of clusters or ejection of grains, sputtering by shock waves and ... Web20 mei 2024 · A hybrid model, which consists of a fluid module, a sheath module and an ion Monte Carlo module, is employed to investigate the dependence of ion energy and …
Web1 aug. 1996 · In this article, we report values of ion energy and angular distributions measured at the grounded electrode of an inductively coupled discharge in chlorine gas. … WebSecondary ion yields and secondary ion energy distributions were examined as a function of the primary ion energies from 50 eV to 100 eV, and as a function of the primary ion mass using He, Ne, and Ar. Emphasis has been placed on characterizing the instrumental operating and response.
WebOverview. The incident (source) particles, their energy spectrum and angular distribution can be specified in terms of the Geant4 General Particle Source (GPS). These settings …
WebWe investigate the energy and angular distributions of ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These … chipotle amherstWeb25 jul. 2014 · Simulation of ion energy and angular distribution functions using Monte Carlo method coupled with multidimensional radio frequency sheath model developed … grant thornton llp georgetownhttp://dspace.nbuv.gov.ua/bitstream/handle/123456789/81155/26-Manuilenko.pdf chipotle amherst nyWebWe studied the angular distributions of silicon and nitrogen atoms emitted from a Si target subjected to reactive sputtering by N 2 + ions at primary energies of 0.5 and 2keV. The … chipotle and haloWebPlasma sheath model and ion energy distribution for all radio frequencies. Theodoros Panagopoulos and Demetre J. Economoua) Plasma Processing Laboratory, Department … grant thornton llp hamiltonWeb18 sep. 2024 · Download PDF Abstract: We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled … chipotle anchorageWebWe studied the angular distributions of silicon and nitrogen atoms emitted from a Si target subjected to reactive sputtering by N 2 + ions at primary energies of 0.5 and 2keV. The composition of the deposited material does not depend strongly on the substrate position. From a comparison with nonreactive sputtering, we show that the observed shift of the Si … grant thornton llp duncan bc